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Product Details:
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| Measured Gas: | AsH₃ | Principle: | Electrochemical |
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| Range: | 0 - 1 Ppm | Sensitivity: | 3000 ± 600 NA/ppm |
| T90 Response Time: | < 60 S | Overload Upper Limit: | 5 Ppm |
| Reproducibility: | < 2% Signal | Baseline: | ±0.02 Ppm |
| Highlight: | AsH3 electrochemical gas sensor,0-1ppm toxic gas leak monitoring,semiconductor fab gas sensor |
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Product Description:
YJJ AsH3/M-1 Electrochemical Gas Sensor 0-1ppm for Semiconductor Fab Toxic Gas Leak Monitoring
Features:
4-Series Micro Package, Arsine (Arsenic Hydride), Toxic Gas Detection in the Semiconductor Industry
| Detected Gas | AsH3 (Arsenic Hydride) |
| Principle | Three-electrode Electrochemical |
| Range | 0 - 1 ppm |
| Maximum Overload | 5 ppm |
| Sensitivity | 3000 ± 600 nA/ppm Membrapor |
| Bias Voltage | 0 mV (No Bias Required) |
| T90 Response Time | < 50 s |
| Baseline (Clean Air at 20°C) | ±0.02 ppm or less |
| Resolution | < 0.01 ppm (Dependent on Back-End Circuit) |
| Repeatability | < ±2% Signal Value |
| Linearity | Linear within the Range |
Environmental conditions
- Operating temperature: **-40 ℃ ~ +50 ℃**
- Humidity: 15% to 90% RH, no condensation
- Atmospheric pressure: 800 to 1200 mbar
- Baseline test conditions: 20℃, 30 to 50% RH, 1 atm
Structure & Lifespan
- Packaging: Miniature 4-series compatible, Φ20 mm, height 16.6 mm, 3 pins
- Expected lifespan: > 24 months
- Warranty: 12 months
- Storage: Cool storage at 0 to 20℃
Cross-interference & Features
- Feature: Ultra-high sensitivity, ppb-level detection, suitable for portable/fixed arsenic hydride detectors
- Cross-interference: Reductive gases such as PH3, SiH4, H2S will cause interference; for high-precision scenarios, pre-filtering + algorithm compensation is required
- Typical applications: **Semiconductor wafer factories, special gas cabinets, arsenic hydride leakage monitoring, personal safety alarm devices, confined space detection
Specifications:
| Principle | Electrochemical |
| Range | 0 - 1 ppm |
| Sensitivity | 3000 ± 600 nA/ppm |
| T90 Response Time | < 60 s |
| Overload Upper Limit | 5 ppm |
| Reproducibility | < 2% Signal |
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Contact Person: Miss. Xu
Tel: 86+13352990255