YJJ MF5006-N2M-E-0.5-50-15-AB-D-A MEMS Thermal Gas Mass Flowmeter 0.5-50 SLPM 1.5MPa

Product Description:

YJJ MF5006-N2M-E-0.5-50-15-AB-D-A MEMS Thermal Gas Mass Flowmeter 0.5 - 50 SLPM 1.5MPa

Features:

I. Model Disassembly (Detailed Meanings of Each Position)

MF5006-N2M-E-0.5-50-15-AB-D-A

MF5006: Series, DN6 (Inner Diameter 6mm, 1/4" Interface)

N2: Standard Gas = Nitrogen (N₂)

M: MEMS Thermal Mass Flow Principle

E: Aluminum Alloy Shell

0.5: Minimum Range 0.5 SLPM (Standard Liters Per Minute at 20°C / 1 atm)

50: Maximum Range 50 SLPM

15: Maximum Working Pressure 1.5 MPa

AB: Output = 4-20mA + RS485 (Modbus-RTU)

D: With LCD Display (Instantaneous + Cumulative Flow)

A: Standard Configuration (No Special Customization)

II. Core Parameters (MF5006-N2M-E-0.5-50-15-AB-D-A)

1. Measurement Performance

Measured Medium: N₂, Air, O₂, Ar, CO₂, etc. Dry, Clean, Oil-Free, No Condensation Gas

Bore / Interface: DN6, 1/4" Inner Thread (G1/4 or NPT1/4)

Range (N₂, 20°C / 1 atm): 0.5–50 SLPM (Standard Liters / Minute)

Accuracy: ±(1.5% Reading + 0.2% FS)

Repeatability: ≤±0.5%FS

Range Ratio: 100:1 (Wide Range, Low Flow Sensitivity)

Response Time: ≤100ms (Fast Follow Flow Changes)

Starting Flow: Low to 8mm/s (Extremely Small Flow Measurable)

2. Electrical and Output

Power Supply: 12–24 VDC ±10%, Power Consumption < 2W

Analog Output: 4–20mA (Corresponding to 0–50 SLPM)

Communication: RS485 (Modbus-RTU), Networkable Remote Monitoring

Display: LCD Screen, Displays Instantaneous Flow (SLPM) + Cumulative Flow

3. Mechanical and Environment

Shell Material: Aluminum Alloy (E-Type), Lightweight, Corrosion Resistant

Contact Material: 316L Stainless Steel

Working Pressure: ≤1.5 MPa (15bar)

Working Temperature: -20°C to +60°C

Humidity: 0–95% RH (No Condensation)

Protection Grade: IP40 (Dustproof, Indoor / General Industrial Environment)

Installation: Horizontal / Vertical Installation at Will, No Straight Pipe Segment Required (Advantage of MEMS Thermal)

4. Principle Characteristics

MEMS Thermal: Direct Measurement of Mass Flow, No Temperature / Pressure Compensation, AccuracyTemperature / Pressure Fluctuations Affect

Ultra-Low Differential Pressure: Minimal Pressure Loss, Suitable for Low Pressure / Small Flow Systems

High Stability: Zero Point Drift Small, Long-Term Maintenance-Free

III. Main Applications (Precise Measurement of Small Bore, Low Flow Gases)

1. Semiconductor / Electronics (Core Scenario)

High-Purity Nitrogen (N₂), Oxygen (O₂), Argon (Ar), Process Gas Ratio and Flow Monitoring

Small Flow Gas Precise Control in Wafer Processing, Diffusion, Etching, Deposition Equipment

2. Medical / Pharmaceutical

Hospital Oxygen / Nitrogen Delivery Flow Monitoring (Respirators, Anesthesia Machines)

Pharmaceutical Sterile Gas, Protective Gas (N₂/Ar) Precise Measurement

3. Laboratory / Research

Small Flow Ratio, Mixing, Reaction Gas Monitoring of Experimental Gases (N₂/O₂/Ar/CO₂)

Low Flow Gas Measurement for Catalysis, Combustion, Environmental Sampling, etc.

4. Industrial Automation

Small Flow Stable Control of Welding Protective Gas (Ar/CO₂)

Flow Monitoring of Precise Processing, Inspection Equipment Blowout / Protection Gas

Small Branch of Compressed Air / Equipment End Energy Consumption Measurement

5. Environmental / New Energy

Low Concentration Exhaust Gas, Tail Gas Small Flow Sampling Monitoring

Low Concentration Hydrogen Gas Measurement for Hydrogen Fuel Cells

Specifications: