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Product Details:
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| Full Scale: | 100 SCCM | Power Supply: | +15 To +28 VDC (single Supply) |
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| Signal: | 0–5V Analog; Supports RS485 Digital Communication | Accuracy: | ±1% FS; Repeatability: ±0.2% FS |
| Highlight: | Gas Mass Flow Controller for semiconductor manufacturing,Medical Air Flow Sensor with warranty,AS200A008C100CJCC Flow Controller |
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AS200A008C100CJCC Gas Mass Flow Controller Use for Semiconductor Manufacturing Process
Typical Applications
Semiconductor processing, CVD, gas distribution systems, laboratory gas control, analytical instruments, etc.
Specification:
| Leak rate | 1×10⁻¹⁰ Pa·m³/s (He) |
| Pressure resistance | 3 MPa |
| AS200 Product Series | MEMS Gas Mass Flow Controller |
| A (Seal Type) | A = Rubber seal; Signal: 0–5V analog input/output |
| 008 (Gas Code) | 008 corresponds to the specified gas |
| C (Range Unit) | C = SCCM (Standard Cubic Centimeters per Minute) |
| 100 (Full Scale) | 100 SCCM |
| CJCC | Suffix for interface, valve type, electrical, and fitting combination |
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Contact Person: Xu
Tel: 86+13352990255