Measurement Range:0~50 SLPM
Repeatability:≤ 0.25%
Response Time:10 ms (Default)
Range:20.5% ~ 95.6% VOL
Concentration resolution:0.1% VOL
Concentration accuracy:±1.2% FS
Range:20.5% ~ 95.6% VOL
Concentration resolution:0.1% VOL
Concentration accuracy:±1.5% FS
O2 concentration range::20.5% ~ 95.6% VOL
Concentration resolution:0.1% VOL
Concentration accuracy:±1.5% FS (5~45℃)
Full Scale:100 SCCM
Power Supply:+15 to +28 VDC (single supply)
Signal:0–5V analog; supports RS485 digital communication
Measurement Principle:MEMS thermal
Accuracy:±(1.5 + 0.2% FS)
Power Supply:12–24 VDC
Recommended working flow rate:50 - 1000 mL/min
External dimensions:Φ25.6 × 16 mm
Weight:4.8 g
Principle:MEMS thermal mass flow sensing
Measured Medium:air, N₂, O₂, Ar, CO₂, etc.
Flow Range:0 - 50 SLPM
Range:0 - 100 SCCM
Accuracy:±1.0%SP (≥35%FS)
Repeatability:±0.2%FS
MF5012:DN12mm
N4F:N = NPT thread
Maximum operating pressure:1.5 MPa
Flow range:2–16 L/min
Accuracy:±3% FS; Repeatability: <2% FS
Power supply:18–28 VDC
Full Scale:500 mL/min
Accuracy:±3% F.S.
Repeatability:0.5% F.S.