Signal Conditioning:Amplified
Flow/Pressure Range:200 sccm
Output Voltage @ Trim Point:5.0 Vdc @ 200 sccm
Flow Range (Full Scale):+1000 sccm
Output Voltage @ Trim Point:5 VDC @ 1000 sccm
Null Voltage:1.00 ±0.10 VDC
Recommended excitation (using test circuit):10 ± 0.01 Vdc 15 Vdc max. (2)
Power consumption:30 mW
Output voltage trim point:50 mV @ 650 sccm
Flow range:+200 SLPM
Excitation voltage:10 Vdc ±0.01 Vdc
Power supply:8.0 Vdc min./10.0 Vdc typ./15.0 Vdc max.
Flow Range (Full Scale):±200 sccm
Output Voltage @ Trim Point:30 mV @ 100 sccm
Null Voltage Shift, Typ. +25°to 25°C, +25°to 85°C:±0.20 mV
Type:differential
Pressure range:±5 mbar | ± 500 Pa | ±2.0 inH2 O
Calibration gas:air
Type:mass flow
Flow range:±200 SCCM
Excitation voltage3:8.0 Vdc min./10 Vdc ±0.01 Vdc typ./15 Vdc max.
Flow range (full scale)1:0 SLPM to 6 SLPM
Calibration gas:nitrogen
Recommended excitation voltage:10.000 ±0.010 Vdc
Flow range (full scale)1:+1000 SCCM
Calibration gas:nitrogen
Recommended excitation voltage:10.000 ±0.010 Vdc
Flow range (full scale)1:±1000 SCCM
Recommended excitation voltage:10 ±0.01 Vdc
Power supply: minimum maximum:8.0 Vdc 15.0 Vdc
Flow range (full scale)1:±30 SCCM
Recommended excitation voltage:10 ±0.01 Vdc
Power consumption:30 mW typ.
Flow/Pressure Range:0 SLPM to 20.0 SLPM
Output Voltage @ Trim Point:5.0 Vdc @ 20 SLPM
Port Style:1/4 in - 18 NPT