Flow Range:0 ~ 100 SLPM
Accuracy:±(2.0 + 0.5% FS) %
Repeatability:±0.5% of reading
Range:0 -100 L/min
Measured gas:Air, Nitrogen, Oxygen, Argon, CO2
Accuracy:±2%RD
Range:0 - 50 L/min
Accuracy:±(1.5 + 0.2 × FS) % 2
Output mode:RS232 / Analog voltage
Precision:0.2 + 3%
Model:Newport E360
Product features:Low pressure differential
Flow range:0 to 180 l/min (short term 260 l/min)
Dead space:< 11 ml (functional)
Resistance:< 0.027 cmH2O/(l/min) over the complete flow range (-180 l/min to 180 l/min)
Port Size:5.08 mm
Shell Material:Silicon
Maximum Operating Temperature:+ 85 °C
Flow:0 to 30 l/min
Dead space:1.3 ml (functional)
Resistance:< 0.17 cmH2O/(l/min) over
Flow range:0 to 180 l/min (short term 260 l/min)
Dead space:< 11 ml (functional)
Resistance:< 0.027 cmH2O/(l/min)
Model Number:FS4003-5-R-BV-A
Usage:Module
Condition:Original 100%
Type:Mass Air Flow Sensor
Used for:Dry Gas
Range:0 SLPM to 10 SLPM
Measurement Range:30 ~ 300 L/min
Repeatability:≤ ±0.5% FS
Response Time (T90):≤ 3 s
Measuring Range:0 - 200 L/min
Repeatability:0.5%FS
Operating Temperature:- 10 ~ + 60℃