Flow Range:0 - 2000sccm
Turn - down Ratio:100:1
Accuracy:±(2.0 + 0.5FS)%
Accuracy:±0.30% reading
Repeatability & Lag:±0.35% reading
Response time:1 ms
Output signal:Digital output
Power supply voltage:3.3V or 5V DC
Accuracy:±2% of full scale (FS)
Flow range:0 - 5000 L/min
Work pressure:Maximum 16 bar
Interface type:M12 socket or gas path board module
Flow range:0 to 180 l/min (short term 260 l/min)
Dead space:< 11 ml (functional)
Resistance:< 0.027 cmH2O/(l/min) over the complete flow range (-180 l/min to 180 l/min)
Flow range:0 to 180 l/min (short term 260 l/min)
Dead space:< 11 ml (functional)
Resistance:< 0.027 cmH2O/(l/min)
Flow:0 to 30 l/min
Dead space:1.3 ml (functional)
Resistance:< 0.17 cmH2O/(l/min) over
Weight:Roughly 0.2 lbs
External Dimensions:About 3.5×4.5×6 inches
Packaging Specification:1 piece per pack
Working Voltage:5.0V
Working Current:25mA
Flow Range:20 - 300SLM
Flow range:+200 SLPM
Excitation voltage:10 Vdc ±0.01 Vdc
Power supply:8.0 Vdc min./10.0 Vdc typ./15.0 Vdc max.
Power supply:18 - 28V DC
Measurement range:0.5 - 4, 50 - 250L/min
Accuracy:< ±3.0% F.S (flow rate) ±5%F.S.max.(@25℃)
Flow range:0~1000sccm
Precision:±(2.0+0.5FS)%
Respone time:8msec